2020 룷넗땳뒪썾뒪듃 2020(PHOTONICS WEST 2020)李멸(2020.2.1~2.6)-172NM

  • AUTHOR: 172NM
  • 2019뀈 11썡 20씪
2020 룷넗땳뒪썾뒪듃 2020(PHOTONICS WEST 2020)李멸(2020.2.1~2.6)-172NM

룷넗땳뒪 썾뒪듃 2020 쟾떆쉶 븞궡

(二)諛곌 172NM 궗뾽遺뿉꽌 2020뀈 2썡 1씪 ~ 2썡 6씪 誘멸뎅 깒봽떆뒪肄 紐⑥뒪肄섏꽱꽣뿉꽌 吏꾪뻾릺뒗 PHOTONICS WEST뿉 李몄뿬빀땲떎.
SPIE뒗 援먯쑁쟻씤 紐⑺몴瑜 吏땶 鍮꾩쁺由 떒泥대줈꽌 愿묒옄븰, 愿묒썝 諛쒖쟾쓣 쐞빐 1955뀈뿉 꽕由쎈릺뿀뒿땲떎. 怨쇳븰, 怨듯븰, 湲곗닠쓽 諛쒖쟾쓣 쐞빐 빟 166媛쒓뎅, 264,000紐낆쓽 援ъ꽦썝뱾뿉寃 쉶쓽 젣怨, 吏냽쟻씤 援먯쑁, 꽌쟻, 꼸 異쒗뙋, SPIE 뵒吏꽭 룄꽌愿, 븰젣媛 젙蹂 援먰솚 吏썝, 쟾臾 꽕듃썙궧 諛 듅뿀 벑쓣 吏썝빀땲떎..2019뀈 援먯쑁 諛 솉蹂 봽濡쒓렇옩 젣옉뿉 SPIE뒗 500留 떖윭 씠긽쓽 吏썝쓣 젣怨듯뻽뒿땲떎. 留롮 愿떖 遺긽 뱶由쎈땲떎.
媛먯궗빀땲떎.

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<뻾궗냼媛>

꽭怨 理쒓퀬쓽 愿묒쟾옄 湲곗닠 뻾궗媛 吏꾪뻾맗땲떎.
留ㅻ뀈 2留2泥쒕챸 씠긽쓽 李몄꽍옄뱾씠 諛붿씠삤硫붾뵒而 愿묓븰, 諛붿씠삤룷넗땳뒪, 궛뾽슜 젅씠, 愿묒쟾옄, 誘몄꽭議곕┰, MOEMS-MEMS, 뵒뒪뵆젅씠 벑뿉 븳 理쒖떊 뿰援щ 뱽怨 씠瑜 떎쁽븯寃 븯뒗 理쒖떊 떎뼇븳 옣移섏 떆뒪뀥쓣 蹂닿린 쐞빐 李몄꽍빀땲떎.

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– 65 Coursed: 뾽怨꾩뿉꽌 媛옣 쑀紐낇븳 紐뉖챺 궗엺뱾怨쇱쓽 硫 諛 議곗뼵쓣 諛쏆쑝떗떆삤
– Two World-Class Exhibitions : 꽭怨 理쒓퀬 닔以쓽 쟾떆쉶瑜 넻빐 理쒓퀬쓽 怨듦툒뾽泥대 留뚮굹怨, 뾽怨꾩쓽 넻李곕젰쓣 뼸怨, 깉濡쒖슫 媛뒫꽦쓣 諛쒓껄븯떗떆삤.

< 쟾떆뭹紐 >

1. 2-CYGNI (PHOTOLITHOGRAPHY)

172nm VUV 愿묒썝쑝濡 룷넗젅吏뒪듃 뾾씠 쑀湲곕Ъ뿉 뙣꽣떇쓣 援ы쁽븷 닔 엳뒗 옣鍮

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